장비는 반도체 기판 및 소자 부품의 절연, 방습 등의 보호층을 형성하는 반도체 패키징 장비로, 반도체 소자의 성능, 내구성 및 신뢰성을 향상시키는 장비임

• 모델: LAVIDA-220H Parylene Conformal Coating System

• Vaporizer Module

• Machined out of solid Aluminum block (Weldment free) 

• Dimer loading capa. : Max. 100g

• Vaporizer heater : Max. 200℃

• Door heater for thermal blocking : Max. 200℃

• Vaporizing temp. setting : Up to 10 step (Temp & Time)

• Pyrolizer Module 

• Pyrolysis tube material : Quartz (or Inconel as an alternative)

• Pyrolysis tube size : I.D. 36mm x Length 790mm (for Quartz)

• Pyrolizer heater : Max. 800℃

• 3 x separated heating zone 

• Deposition Chamber

• Type : Horizontal chamber

• Machined out of solid Aluminum block (Weldment free!) 

• Deposition region : I.D. 280mm x Length 420mm

• Viewport : Dia. 85mm glass viewport x 1 ea 

• Sealing between chamber and pyrolysis tube : Perfluoro elastomer seal x 2 ea 

• gchip@gachon.ac.kr