고전력 소스미터 및 볼트미터등을 활용 가능한 고전력 척 및 포지셔너를 포함한 시스템

• Hot chuck: Maximum temperature(RT ~ 200 degree C), Temperature resolution(less than 1 degree C), Gold Back bias & Insolation Chuck

• Microscope: Maximum(300x), Zoom(1x ~ 5x, Object Lens : 5x), Fiber Ring Guide

• CCD Camera: 4K@1080p@60FPS, CCD C-mount, 1/2", 15" LCD Monitor Dual Port

• Dark Shield Box: High Power Safety DarkBox

• High Power Positioner PB100: X/y Fine Manual knob, Z Micrometer knob X/y Stage Travel(10mm), Resolution(1um less than), Z Stage Travel(16mm), Resolution(1um less than), Vacuum Base Block Type

• Probe Tip M5ST20HP: Gold-SK, Straight Type, MST 0.5 x 27mm, Tip dia 20um,10pcs

• MBG40: Ceramic Back Gate, 40mm x 40mm x 0.5(t)

• MSA002: 620ml/sec, Low Sound, Anti Vibration Housing Cover

• Plate Panel: 4 TRX's , 4 BNC's

• gchip@gachon.ac.kr